Micromachined capacitive RF pressure sensor
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United States of America Patent
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Sep 20, 2005
Grant Date -
N/A
app pub date -
Mar 4, 2004
filing date -
Mar 4, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A Capacitive Micromachined Ultrasonic RF (CMURF) pressure sensor is described. This micromachined pressure sensor has: pressure sensitive capacitance elements including a scalable array of micromachined cells of the type including electrodes carried by a sealed membrane supported above a common electrode with conductive lines interconnecting the electrodes having an electrostatic capacitance ΔCm changing with a pressure to be detected; reference capacitance elements including a scalable array of micromachined cells of the type including electrodes carried by a stacked of membranes supported above a common electrode with conductive lines interconnecting the electrodes having an electrostatic capacitance Cm not changing with the pressure. A method of operating a pressure sensor array is also described.
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