Method for recovering an organic solvent from a waste stream containing supercritical CO2

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United States of America Patent

PATENT NO 6946055
APP PUB NO 20030044340A1
SERIAL NO

09934864

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Abstract

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An organic solvent is separated from a waste stream containing supercritical CO2, an organic solvent and etchant contaminants. The process includes separating the supercritical CO2 by subjecting the waste stream to elevated temperature and/or reduced pressure to thereby obtain a first composition containing the supercritical CO2 and a second composition containing the organic solvent and being substantially free of the supercritical CO2; and then removing non-volatile etching contaminants from the second stream search as by at least one of the following: evaporation; distillation; filtration; centrifugation; and settling.

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Patent Owner(s)

Patent OwnerAddress
GLOBALFOUNDRIES INCGRAND CAYMAN CAYMAN ISLANDS

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bhatt, Anilkumar C Johnson City, NY 31 951
Wagner, Jerome J Endicott, NY 8 34

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