Semiconductor and device nanotechnology and methods for their manufacture
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United States of America Patent
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Sep 20, 2005
Grant Date -
Aug 19, 2004
app pub date -
Feb 20, 2004
filing date -
Nov 6, 1998
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Abstract
Device nanotechnology based on silicon wafers and other substrates is described. Methods for preparing such devices are discussed. The teachings allow integration of current semiconductor device, sensor device and other device fabrication methods with nanotechnology. Integration of nanotubes and nanowires to wafers is discussed. Sensors, electronics, biomedical and other devices are presented.
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