Manufacture of probe unit having lead probes extending beyond edge of substrate
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United States of America Patent
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-
Sep 20, 2005
Grant Date -
Sep 26, 2002
app pub date -
Mar 19, 2002
filing date -
Mar 23, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A sacrificial layer is formed in a recess of a substrate, and leads extending from the substrate into an area of the sacrificial layer are formed. A cut is formed from the bottom surface of the substrate, the cut extending from the bottom surface to the area of the sacrificial layer via the substrate, then the sacrificial layer is removed. A probe unit can be obtained having the leads whose front portions extend beyond the edge of the substrate. A through conductor may be formed in a through hole formed in a substrate. Leads may be formed on a photosensitive etching glass substrate to thereafter selectively etch the chemically cutting type glass.
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