Methods to make diffractive optical elements
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United States of America Patent
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Sep 20, 2005
Grant Date -
Mar 24, 2005
app pub date -
Sep 19, 2003
filing date -
Sep 19, 2003
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Abstract
A method for forming a diffractive lens includes forming an etch stop layer on a first surface of a silicon substrate, forming a diffractive optical element above the etch stop layer, forming a planarization layer covering the diffractive optical element, planarizing the planarization layer, forming a bonding layer on the planarization layer, bonding a transparent substrate on the bonding layer, and etching a second surface of the silicon substrate to the etch stop layer to remove a portion of the silicon substrate opposite the diffractive optical element, wherein the remaining portion of the silicon substrate forms a bonding ring.
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