Mirror for reflecting electromagnetic radiation as well as illumination and imaging method employing the same
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United States of America Patent
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Sep 27, 2005
Grant Date -
Feb 13, 2003
app pub date -
Jul 22, 2002
filing date -
Jul 23, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A mirror arrangement for reflecting electromagnetic radiation has a mirror body with a mirror side disposed towards the radiation to be reflected and at least one extension sensor located at the mirror body for detecting a deformation state of the mirror body. The mirror body includes semiconductor layer where the at least one extension sensor is located.
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