Alignment of semiconductor wafers and other articles

United States of America Patent

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Sep 27, 2005
Grant Date
Feb 13, 2003
app pub date
Oct 15, 2002
filing date
Jul 13, 2001

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Expired

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Abstract

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A wafer or some other article is aligned while being held by an end-effector.

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Patent Owner	Address
TRU-SI TECHNOLOGIES INC	SUNNYVALE CA

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B65G:TRANSPORT OR STORAGE DEVICES, e.g. CONVEYERS FOR L....

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Inventor Name	Address	# of filed Patents	Total Citations
Berger, Alexander J	Palo Alto, CA	15	204
Kretz, Frank E	Santa Clara, CA	11	147

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Alignment of semiconductor wafers and other articles

Number of patents in Portfolio can not be more than 2000

United States of America Patent

10272257

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PATENT NO	6948898
APP PUB NO	20030031549A1
SERIAL NO	10272257
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity Expired	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
September 27, 2005	US,6948898,B2 US6948898B2	GRANTED PATENT AS SECOND PUBLICATION
February 13, 2003	US,20030031549,A1 US20030031549A1	FIRST PUBLISHED PATENT APPLICATION

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10272257

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