System for monitoring substrate conditions
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United States of America Patent
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Sep 27, 2005
Issued Date -
N/A
app pub date -
Sep 25, 2002
filing date -
Oct 28, 1997
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A system for determining at least one condition of a substrate includes an optical waveguide for transmitting light from a light source. The optical waveguide can be embedded in the substrate and operatively coupled to an interferometric system. The interferometric system is operatively coupled to a processor. The interferometric system provides the processor with information relating to transmissions through the wave guide, which are indicative of substrate conditions and/or operations being performed relative to the substrate.
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