Alignment sensor
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Sep 27, 2005
Grant Date -
Jul 10, 2003
app pub date -
Dec 4, 2002
filing date -
Dec 7, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The present invention relates in general to detection of an alignment mark on a workpiece. More particularly, interferometry is applied to detect alignment signals from the surface of a workpiece such as a wafer or reticle. Other aspects of the present invention are reflected in the detailed description, figures and claims.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully