Assembly and method for transferring imprint lithography templates
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United States of America Patent
Stats
-
Oct 4, 2005
Grant Date -
Sep 29, 2005
app pub date -
May 14, 2003
filing date -
May 14, 2003
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Disclosed is a template transfer assembly and method that features a template transfer substrate, and a template having first and second sides, with the first side facing away from the template transfer substrate and the second side facing the template transfer substrate and having mold pattern formed thereon. Polymerized imprint material is disposed between the second side and the template transfer substrate to fixedly attach the template to the template transfer substrate. The method of transferring an imprint lithography template includes dispensing a selected volume of imprinting fluid onto the template transfer substrate, placing the template upon the selected volume; and converting the imprinting fluid to solid imprint material. The selected volume of imprint material is of sufficient quantity to fixedly attach the template to the template transfer substrate while maintaining a space between the mold and the template transfer substrate.
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