Importance

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Abstract

An inspection apparatus and method are disclosed. The inspection apparatus comprises a probe 30 having a width equal to or less than that of the layout pitch of conductive patterns 15 to be inspected, and a sensor section 20 having an area capable of covering the layout region of the conductive patterns. The probe 30 is adapted to be scanningly moved across an inspection-signal supply region including respective portions of the conductive patterns. The sensor section 20 is positioned opposed to the conductive patterns 15. An AC inspection signal is fed from an AC power source 35 to the probe 30 to form a capacitive coupling between one electrode or the conductive pattern, and the other electrode or the sensor section 20, and a detected signal from the sensor section 20 is amplified through an amplifier 25 to check the detected signal. Then, it is determined if each of the conductive patterns supplied with the inspection signal includes a short-circuit, according to whether the level of the detected signal is different from a signal level in a normal state. The present invention can provide an inspection apparatus and method capable of readily detecting a short-circuit possibly existing in various conductive patterns, in a simple control.

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First Claim