Lithographic apparatus and device manufacturing method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6952253
APP PUB NO 20040207824A1
SERIAL NO

10705783

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Abstract

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In a lithographic projection apparatus, a structure surrounds a space between the projection system and a substrate table of the lithographic projection apparatus. A gas seal is formed between said structure and the surface of said substrate to contain liquid in the space.

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Patent Owner(s)

  • ASML NETHERLANDS B.V.

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
De, Smit Joannes Theodoor Eindhoven, NL 50 5861
Derksen, Antonius Theodorus Anna Maria Eindhoven, NL 56 3325
Hoogendam, Christiaan Alexander Veldhoven, NL 205 9818
Kolesnychenko, Aleksey Nijmegen, NL 35 3100
Lof, Joeri Eindhoven, NL 94 8069
Loopstra, Erik Roelof Heeze, NL 325 13253
Modderman, Theodorus Marinus Nuenen, NL 39 4282
Mulkens, Johannes Catharinus Hubertus Maastricht, NL 211 10736
Ritsema, Roelof Aeilko Siebrand Eindhoven, NL 37 4911
Simon, Klaus Eindhoven, NL 89 7263
Straaijer, Alexander Eindhoven, NL 87 7771
Streefkerk, Bob Tilburg, NL 201 10445
Van, Santen Helmar Amsterdam, NL 101 4690

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