Hinge structures for micro-mirror arrays
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United States of America Patent
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Oct 4, 2005
Grant Date -
Aug 12, 2004
app pub date -
Feb 12, 2003
filing date -
Aug 11, 2000
priority date (Note) -
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Abstract
A method and spatial light modulator are provided herein. The spatial light modulator has a higher resolution and an increased fill factor. The spatial light modulator also provides an increased contrast ratio. Furthermore, the spatial light modulator of the present invention can be operated in the absence of polarized light and that has improved electro-mechanical performance and robustness with respect to manufacturing. A method and its alternative are disclosed herein by the present invention for manufacturing the spatial light modulator.
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