Interferometric modulation pixels and manufacturing method thereof
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United States of America Patent
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Oct 4, 2005
Grant Date -
Mar 3, 2005
app pub date -
Apr 2, 2004
filing date -
Aug 29, 2003
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Abstract
A protection layer covers the cavity-side surface of a bottom electrode of a interferometric modulation pixel. Consequently, the protective layer protects the surface of the bottom electrode while a sacrificial layer between the bottom electrode and the top electrode is being etched. Thus, the distance between the bottom electrode and the top electrode is maintained, thereby ensuring that only the light with desired wavelengths is reflected by the interferometric modulation pixel.
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