Variable mirror and information apparatus comprising variable mirror
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United States of America Patent
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-
Oct 4, 2005
Grant Date -
Apr 1, 2004
app pub date -
Jan 29, 2002
filing date -
Jan 30, 2001
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A deformable mirror according to the invention comprises a substrate, a reflector which is supported by said substrate and the shape of whose reflecting areas is variable, and a plurality of drive units for independently driving a plurality of regions of the reflector and thereby controlling the distances between said plurality of regions and said substrate. Each of the plurality of drive units comprises a plurality of electrodes disposed over said substrate, a tilt member which is rotated round the axis of tilt by being attracted by the selected one of the plurality of electrodes, and an action member for varying the distance between a specific region of the reflector and said substrate following the motion of the tilt member.
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