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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

• BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM

International Classification(s)

• G01B:MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIME....

• [Classification Symbol]

• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Bailey, Todd	Austin, TX	28	1153
Choi, Byung J	Round Rock, TX	35	1914
Colburn, Matthew	Danbury, CT	17	981
Ekerdt, John	Austin, TX	10	623
Sreenivasan, S V	Austin, TX	15	680
Willson, C Grant	Austin, TX	38	981

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
October 11, 2005	US,6954275,B2   US6954275B2	GRANTED PATENT AS SECOND PUBLICATION
July 18, 2002	US,20020093122,A1   US20020093122A1	FIRST PUBLISHED PATENT APPLICATION

Full Text

US Patent No: 6954275

Methods for high-precision gap and orientation sensing between a transparent template and substrate for imprint lithography

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