Micro-mirror device including dielectrophoretic liquid
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United States of America Patent
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Oct 11, 2005
Grant Date -
Oct 30, 2003
app pub date -
Mar 12, 2003
filing date -
Apr 30, 2002
priority date (Note) -
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Abstract
A micro-mirror device includes a substrate having a surface, and a plate spaced from and oriented substantially parallel to the surface of the substrate such that the plate and the surface of the substrate define a cavity therebetween. A dielectrophoretic liquid capable of movement when an electrical signal is applied to the micro-mirror device is disposed in the cavity, and a reflective element is interposed between the surface of the substrate and the plate such that the reflective element is adapted to move between a first position and at least one second position.
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