Attenuated total reflection spectroscopic analysis of organic additives in metal plating solutions

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United States of America Patent

PATENT NO 6954560
APP PUB NO 20040126049A1
SERIAL NO

10331396

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Abstract

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The present invention relates to method and apparatus for determining concentrations of organic additives in metal plating solutions, based on infrared spectroscopy, and more specifically attenuated total reflection infrared spectroscopy (ATR-IR).

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Patent Owner(s)

Patent OwnerAddress
ANCOSYS GMBH72124 PLIEZHAUSEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
King, Mackenzie Southbury, CT 30 318
Tolmachev, Yuriy V Woodridge, IL 3 14

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