Methods for forming and releasing microelectromechanical structures
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United States of America Patent
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Nov 1, 2005
Grant Date -
Feb 26, 2004
app pub date -
Mar 28, 2003
filing date -
Oct 26, 1999
priority date (Note) -
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Abstract
A method for making a spatial light modulator is disclosed, that comprises forming an array of micromirrors each having a hinge and a micromirror plate held via the hinge on a substrate, the micromirror plate being disposed in a plane separate from the hinge and having a hinge made of a transition metal nitride, followed by releasing the micromirrors in a spontaneous gas phase chemical etchant. Also disclosed is a projection system that comprises such a spatial light modulator, as well as a light source, condensing optics, wherein light from the light source is focused onto the array of micromirrors, projection optics for projecting light selectively reflected from the array of micromirrors onto a target, and a controller for selectively actuating the micromirrors in the array.
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