System and method for a mass flow controller
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United States of America Patent
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Nov 8, 2005
Grant Date -
Dec 26, 2002
app pub date -
Apr 24, 2002
filing date -
Apr 24, 2001
priority date (Note) -
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Abstract
A system and method for controlling a mass flow controller to have a constant control loop gain under a variety of different types of fluids and operating conditions, and for configuring the mass flow controller for operation with a fluid and/or operating conditions different from that used during a production of the mass flow controller. Further, the system and method includes providing control by reducing the effects of hysteresis in solenoid actuated devices by providing a non-operational signal to the solenoid actuated device.
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