Substrate processing apparatus control system and substrate processing apparatus
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United States of America Patent
Stats
-
Nov 8, 2005
Grant Date -
Mar 27, 2003
app pub date -
Sep 23, 2002
filing date -
Sep 25, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A controller is connected to a substrate processing apparatus and an exposure apparatus. A pilot substrate subjected to a series of processing as preprocessing is transported to an inspection unit. An inspection result determination part compares inspection results received from the inspection unit with substrate condition data so that a condition change instruction part changes the processing condition of each processing unit when no requirement is satisfied. This operation is so repeated that a processing control part executes actual processing according to recipe data when the inspection results satisfy the requirement. Thus, the efficiency a step of changing the processing condition of each processing part in response to the inspection results in the inspection part is improved in preprocessing executed in the substrate processing apparatus.
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