Chuck for holding a device under test
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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Nov 15, 2005
Grant Date -
Mar 7, 2002
app pub date -
Jun 7, 2001
filing date -
Sep 5, 2000
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A chuck for a probe station that include a first chuck assembly element defining a substantially planar upper and lower surfaces, and another chuck assembly element defining a substantially planar surface. The chuck includes a spacing mechanism having exactly three independent supports interconnecting the first chuck assembly element and the another chuck assembly element defining the spacing between the first chuck assembly element and the another chuck assembly element in such a manner that the substantially planar lower surface of the first chuck assembly element and the substantially planar upper surface of the another chuck assembly element are in opposing relationship with respect to one another.
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