Lithographic apparatus device manufacturing method and device manufactured thereby
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United States of America Patent
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-
Nov 22, 2005
Grant Date -
Oct 14, 2004
app pub date -
Apr 30, 2004
filing date -
Jul 13, 2000
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A lithographic projection apparatus includes an active reflector in a radiation system providing a projection beam of radiation and/or in a projection system. The active reflector includes a body member, a reflective multilayer and at least one actuator controllable to adjust the surface figure of the reflecting multilayer, wherein the actuator exerts a substantial force component in a direction parallel to the surface figure of said reflective multilayer. The actuator may be operative to apply torques to said reflector.
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Cited Art Landscape
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