Microelectromechanical mirrors and electrically-programmable diffraction gratings based on two-stage actuation
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United States of America Patent
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Nov 22, 2005
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N/A
app pub date -
Nov 24, 2003
filing date -
Nov 24, 2003
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Abstract
A microelectromechanical (MEM) device for redirecting incident light is disclosed. The MEM device utilizes a pair of electrostatic actuators formed one above the other from different stacked and interconnected layers of polysilicon to move or tilt an overlying light-reflective plate (i.e. a mirror) to provide a reflected component of the incident light which can be shifted in phase or propagation angle. The MEM device, which utilizes leveraged bending to provide a relatively-large vertical displacement up to several microns for the light-reflective plate, has applications for forming an electrically-programmable diffraction grating (i.e. a polychromator) or a micromirror array.
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