METHOD AND APPARATUS FOR REDUCING CHARGE INJECTION IN CONTROL OF MEMS ELECTROSTATIC ACTUATOR ARRAY
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United States of America Patent
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Nov 29, 2005
Grant Date -
Dec 1, 2005
app pub date -
May 28, 2004
filing date -
May 28, 2004
priority date (Note) -
Granted
status (Latency Note)
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Abstract
A control circuit for a MEMS (Micro-Electro-Mechanical System) has a semiconductor switch which has a source, a drain and a gate, which is associated with a selected one of spatially arranged fixed and movable plates of a variable capacitor, and is arranged to selectively connect the selected one of the fixed and movable plates with a voltage source. A charge injection control circuit is associated with the semiconductor switch and attenuates current injection into the selected one of the fixed and movable plates of the capacitor.
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