High angle micro-mirrors and processes
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United States of America Patent
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Nov 29, 2005
Issued Date -
N/A
app pub date -
Nov 16, 2004
filing date -
Feb 12, 2003
priority date (Note) -
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Abstract
A micro-mirror that comprises a substrate, a hinge structure formed on the substrate and a mirror plate attached to the hinge structure is provided for use in display systems. The mirror plate is capable of rotating from a non-deflected resting state to a state that is at least 14° degrees. In operation, the micro-mirror switches between an 'ON'-state and 'OFF'-state, which are defined in accordance with a rotational position of the mirror plate. The OFF state can be a non-deflected position of the micro-mirror (generally parallel to the substrate), the same angle (though opposite direction) as the ON state, or an angle less than the ON state (though in the opposite direction). Reflected light from the 'ON' and 'OFF' states are thus separated and the contrast ratio is improved.
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