Semiconductor dynamic quantity sensor with movable electrode and fixed electrode supported by support substrate
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United States of America Patent
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Dec 13, 2005
Grant Date -
Feb 28, 2002
app pub date -
Aug 9, 2001
filing date -
Aug 29, 2000
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A semiconductor dynamic quantity sensor has a support substrate with a rectangular opening portion, and a movable electrode and fixed electrodes are respectively supported by the support substrate through supporting portions to face the opening portion. The supporting portions supporting the movable electrode are arranged in a direction approximately the same as that in which the supporting portions supporting the fixed electrodes are arranged.
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