Method and apparatus for generating a membrane target for laser produced plasma

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United States of America Patent

PATENT NO 6977383
APP PUB NO 20040200977A1
SERIAL NO

10750022

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method and apparatus for generating membrane targets for a laser induced plasma is disclosed herein. Membranes are advantageous targets for laser induced plasma because they are very thin and can be readily illuminated by high-power coherent light, such as a laser, and converted into plasma. Membranes are also advantageous because illumination of the membrane with coherent light produces less debris and splashing than illumination of a thicker, solid target. Spherical membranes possess additional advantages in that they can be readily illuminated from variety of directions and because they can be easily placed (i.e. blown) into a target region for illumination by coherent light. Membranes are also advantageous because they can be formed from a liquid or molten phase of the target material. According to another embodiment, membranes can be formed from a solution in which the target materials are solvated. Membranes can be formed an a variety of ways, such as by rotating a circular apparatus through a reservoir of liquid target material such that membranes form across apertures that are disposed in the circular apparatus. Spherical membranes can also be formed by applying a gas (i.e. blowing) against a membrane formed in an aperture of a circular apparatus.

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Patent Owner(s)

Patent OwnerAddress
JMAR LLC A DELAWARE LIMITED LIABILITY COMPANY10905 TECHNOLOGY PLACE SAN DIEGO CA 92127

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Morris, James Encinitas, CA 56 764
Rieger, Harry R San Diego, CA 1 7
Turcu, I C Edmond Wantage, GB 3 33

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