Micro-electromechanical fluid ejection device having nozzle chambers with diverging walls
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United States of America Patent
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-
Dec 27, 2005
Grant Date -
Jun 17, 2004
app pub date -
Dec 8, 2003
filing date -
Jun 9, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A micro-electromechanical fluid ejection device includes a substrate that defines a plurality of fluid supply channels and a plurality of chambers in fluid communication with respective fluid supply channels. A drive circuitry layer is positioned on the substrate. A plurality of roof structures are connected to the drive circuitry layer to cover respective fluid chambers. Each roof structure defines a fluid ejection port. A plurality of actuators is connected to the drive circuitry layer and is operatively positioned at respective chambers to eject fluid from the fluid ejection ports on receipt of an electrical signal from the drive circuitry layer. The substrate defines chamber walls that diverge from respective ink inlet channels to respective roof structures.
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