Laser system and method for material processing with ultra fast lasers

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United States of America Patent

PATENT NO 6979798
SERIAL NO

10787517

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Abstract

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Laser system and method for material processing with ultra fast lasers are provided. One aspect of the invention features the method which removes at least a portion of a target structure such as a memory link while avoiding undesirable damage to adjacent non-target structures. The method includes applying a single ultra short laser pulse to the target structure to remove the target structure with the single pulse.

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Patent Owner(s)

Patent OwnerAddress
ELECTRO SCIENTIFIC INDUSTRIES INC14523 SW MILLIKAN WAY BEAVERTON OR 97005

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gu, Bo North Andover, MA 36 801
Pelsue, Kurt Wayland, MA 15 354
Svetkoff, Donald J Ann Arbor, MI 57 2996

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