Micromirrors with novel mirror plates
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United States of America Patent
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Dec 27, 2005
Grant Date -
N/A
app pub date -
Aug 25, 2004
filing date -
Aug 25, 2004
priority date (Note) -
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Abstract
A spatial light modulator is disclosed, along with methods for making such a modulator. The spatial light modulator comprises an array of micromirrors each of which comprises a deflectable and reflective mirror plate. For enabling the deflection of the mirror plate, incisions are made within the area of the mirror plate with each incision being fully enclosed within the area of the mirror plate. The incisions collectively define a deformable hinge that is on the same plane as the mirror plate at the non-deflected state.
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