System and method for real-time fault detection, classification, and correction in a semiconductor manufacturing environment
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United States of America Patent
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Dec 27, 2005
Grant Date -
Nov 10, 2005
app pub date -
Apr 23, 2004
filing date -
Apr 23, 2004
priority date (Note) -
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Abstract
A system and method for detecting a fault and identifying a remedy for the fault in real-time in a semiconductor product manufacturing facility are provided. In one example, the method includes importing data from a manufacturing device and data representing a plurality of different manufacturing devices into an analysis tool. The imported data is analyzed using the analysis tool to determine if a fault exists in the manufacturing device's operation and, if a fault exists, the fault is classified and a remedy for the fault is identified based at least partly on the classification. Configuration data used to control the manufacturing device may be updated, and the update may apply the remedy to the configuration information. The manufacturing device's operation may then be modified using the updated configuration data.
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