ALN material and electrostatic chuck incorporating same
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United States of America Patent
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Jan 3, 2006
Grant Date -
Jun 24, 2004
app pub date -
Dec 23, 2002
filing date -
Dec 23, 2002
priority date (Note) -
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Abstract
An electrostatic chuck is provided which includes a ceramic body comprising aluminum nitride (AlN), and at least one electrode in the ceramic body. According to a particular feature of this embodiment, the aluminum nitride has a resistivity ratio ρ10V/ρ500V less than about 5. In this regard, ρ10V represents the resistivity of the electrostatic chuck at 10 applied volts while ρ500V represents the resistivity of the AlN material at 500 applied volts.
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