Method and apparatus for monitoring parts in a material processing system

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United States of America Patent

PATENT NO 6985787
APP PUB NO 20040128014A1
SERIAL NO

10331340

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present invention presents an improved apparatus and method for monitoring parts in a material processing system, wherein the material processing system includes a processing tool, a number of RF-responsive part identifiers coupled to the processing tool to generate and transmit part ID data, and a sensor interface assembly (SIA) configured to receive the part ID data from the plurality of RF-responsive part identifiers.

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Patent Owner(s)

Patent OwnerAddress
TOKYO ELECTRON LIMITED3-1 AKASAKA 5-CHOME MINATO-KU TOKYO 1076325 ?1076325

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Klekotka, James E Mesa, AZ 13 135

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