Raised microstructure of silicon based device

United States of America Patent

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Jan 17, 2006
Grant Date
Jan 23, 2003
app pub date
Jul 20, 2001
filing date
Jul 20, 2001

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Abstract

A raised microstructure for use in a silicon based device, such as a microphone, is disclosed. The raised microstructure comprises a generally planar film having a ribbed sidewall supporting the film.

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Patent Owner	Address
KNOWLES ELECTRONICS INC	1151 MAPLEWOOD DRIVE ITASCA IL 60143

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H04R:LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR ....

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Inventor Name	Address	# of filed Patents	Total Citations
Lee, Sung Bok	Chicago, IL	40	415
Loeppert, Peter V	Hoffman Estates, IL	58	1769

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Raised microstructure of silicon based device

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United States of America Patent

09910110

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PATENT NO	6987859
APP PUB NO	20030016839A1
SERIAL NO	09910110
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
January 17, 2006	US,6987859,B2 US6987859B2	GRANTED PATENT AS SECOND PUBLICATION
January 23, 2003	US,20030016839,A1 US20030016839A1	FIRST PUBLISHED PATENT APPLICATION

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