Methods and systems for processing a substrate using a dynamic liquid meniscus
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United States of America Patent
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Jan 24, 2006
Issued Date -
N/A
app pub date -
Mar 31, 2003
filing date -
Sep 30, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A system and method of moving a meniscus from a first surface to a second surface includes forming a meniscus between a head and a first surface. The meniscus can be moved from the first surface to an adjacent second surface, the adjacent second surface being parallel to the first surface. The system and method of moving the meniscus can also be used to move the meniscus along an edge of a substrate.
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