Method and apparatus for debris mitigation for an electrical discharge source

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United States of America Patent

PATENT NO 6989629
SERIAL NO

11040627

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Abstract

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Method and apparatus for mitigating the transport of debris generated and dispersed from electric discharge sources by thermophoretic and electrostatic deposition. A member is positioned adjacent the front electrode of an electric discharge source and used to establish a temperature difference between it and the front electrode. By flowing a gas between the member and the front electrode a temperature gradient is established that can be used for thermophoretic deposition of particulate debris on either the member or front electrode depending upon the direction of the thermal gradient. Establishing an electric field between the member and front electrode can aid in particle deposition by electrostatic deposition.

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Patent Owner(s)

Patent OwnerAddress
EUV LLCSANTA CLARA CA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Klebanoff, Leonard E San Clemente, CA 24 305
Rader, Daniel J Albuquerque, NM 40 472
Silfvast, William T Helena, CA 25 585

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