Method of determining local structures in optical crystals
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United States of America Patent
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Jan 24, 2006
Grant Date -
Feb 5, 2004
app pub date -
Jun 18, 2003
filing date -
Jun 19, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The method for determining local structures in optical materials, especially crystals, includes observing schlieren visually in a material to be tested with divergent white light in a first step; measuring birefringence of polarized laser light in the material to determine local defects and structure faults in the material with a spatial resolution of 0.5 mm or better in a second step if the material is judged to be suitable in the first step and then interferometrically measuring the material to determine the faults in the material by interferometry in a third step if the material is judged to be suitable in the first and second steps. This method can be part of a method for making optical components, especially for microlithography.
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