Apparatus for manually and automatically processing microelectronic workpieces
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United States of America Patent
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Jan 31, 2006
Grant Date -
Aug 28, 2003
app pub date -
Feb 22, 2002
filing date -
Feb 22, 2002
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A method and apparatus for manually and automatically processing microelectronic workpieces. The apparatus can include a tool having a plurality of processing stations, all of which are manually accessible to a user, and an input/output station configured to support at least one microelectronic workpiece for automatic transfer to and from the processing stations. A transfer device is positioned proximate to the input/output station and the processing stations and is configured to automatically transfer microelectronic workpieces between the input/output station and the processing stations. The apparatus can be used for both manual and automatic processing of microelectronic workpieces, either sequentially or simultaneously.
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