Rail stack array of charge storage devices and method of making same
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United States of America Patent
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Jan 31, 2006
Grant Date -
Oct 28, 2004
app pub date -
May 20, 2004
filing date -
Aug 14, 2000
priority date (Note) -
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Abstract
There is provided a monolithic three dimensional array of charge storage devices which includes a plurality of device levels, wherein at least one surface between two successive device levels is planarized by chemical mechanical polishing.
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