Membrane gas valve for pulsing a gas
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United States of America Patent
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Feb 7, 2006
Grant Date -
Jul 29, 2004
app pub date -
Jan 29, 2003
filing date -
Jan 29, 2003
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A gas valve for pulsing a gas comprises a housing having an inlet port, an outlet port, a membrane, and an actuator, wherein the actuator selectively engages the membrane with the inlet port. In one embodiment, a plurality of the gas valves are coupled together to form an apparatus for synchronized pulsing of a plurality of individual gases.
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