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Abstract

A thin film battery including an anode layer, a cathode layer and a solid electrolyte layer. The battery also includes, a planarization layer applied to the thin film battery. The planarization layer has a surface roughness of no more than about 1.0 nanometers root mean square and a flatness no larger than about 0.005 cm/inch. A barrier layer is applied to the planarization layer. The barrier layer is provided by one or more layers of material selected from the group consisting of polymeric materials, metals and ceramic materials. The planarization layer and barrier layer are sufficient to reduce oxygen flux through the barrier layer to the anode layer to no more than about 1.6 μmol/m2-day, and H2O flux through the barrier layer to the anode layer to less than about 3.3 μmol/m2-day thereby improving the life of the thin film battery.

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