Circuit pattern inspection apparatus, circuit pattern inspection method, and recording medium
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Feb 7, 2006
Grant Date -
Aug 5, 2004
app pub date -
May 23, 2002
filing date -
May 24, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Disclosed is a circuit-pattern inspection apparatus for inspecting a comb-shaped pattern 20 having an edge region formed as a plurality of finger pattern segments and a base region formed as an integral connection pattern segment, and a plurality of discrete patterns 30 each disposed between the adjacent finger pattern segments in a non-connecting manner and being not in connecting with the remaining discrete patterns. The inspection apparatus comprises means for supplying an AC signal alternately to either one of the finger pattern segments and both the finger pattern segments and the discrete patterns while maintaining the other at a ground potential, and sensors 131, 132, 133 for detecting the AC signal disposed in the edge region. The inspection apparatus can reliably detect the presence of defects in a circuit board without any difficulties.
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