System for processing a workpiece
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United States of America Patent
Stats
-
Feb 14, 2006
Grant Date -
Dec 13, 2001
app pub date -
Aug 2, 2001
filing date -
Mar 13, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An apparatus for processing a workpiece in a micro-environment includes a workpiece housing connected to be rotated by a motor. The workpiece housing forms a substantially closed processing chamber where one or more processing fluids are distributed across at least one face of the workpiece by centrifugal force generated during rotation of the housing. A sump is connected to an inlet and an outlet in the chamber. Rotation of the workpiece housing recirculates fluid into the chamber.
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Cited Art Landscape
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