Methods and systems for processing a bevel edge of a substrate using a dynamic liquid meniscus
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United States of America Patent
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-
Feb 21, 2006
Grant Date -
Apr 15, 2004
app pub date -
Jun 24, 2003
filing date -
Sep 30, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A system and method for processing an edge of a substrate includes an edge roller and a first proximity head. The first proximity head being mounted on the edge roller. The first proximity head capable of forming a meniscus and including a concave portion and multiple ports opening into the concave portion. The concave portion being capable of receiving an edge of a substrate and the ports including at least one process liquid injection port, at least one vacuum port and at least one surface tension control port.
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