Floating entrance guard for preventing electrical short circuits
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United States of America Patent
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-
Feb 21, 2006
Grant Date -
N/A
app pub date -
Sep 30, 2002
filing date -
Sep 30, 2002
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Methods and apparatuses are provided for protecting an interconnect line in a microelectromechanical system. The interconnect line is disposed over a substrate for conducting electrical signals, such as from a bonding pad to a mechanical component to effect movement as desired of the mechanical component. A first protective covering is disposed over a first portion of the interconnect line and a second protective covering is disposed over a second portion of the interconnect line. The first protective covering is provided in electrical communication with the substrate and the second protective covering is electrically isolated from the substrate.
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