Micromachined fluidic device and method for making same
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Feb 28, 2006
Grant Date -
Mar 18, 2004
app pub date -
May 25, 2001
filing date -
May 25, 2000
priority date (Note) -
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status (Latency Note)
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Abstract
The fluid-flow device (100) of the invention comprises a stack (30) covered by a closure wafer (20), said stack (30) comprising a support wafer (36), a layer of insulating material (34), and a silicon layer (32). The closure wafer (20) and/or said silicon layer (32) are machined so as to define a cavity (38) between said closure wafer (20) and said silicon layer (32), said support wafer (36) has at least one duct (102) passing right through it, said layer of insulating material (34) presenting at least one zone (35) that is entirely free of material placed at least in line with said duct (102) so as to co-operate with said cavity (38) to define a moving member (40) in said silicon layer (32), the moving member being suitable under the pressure of liquid in said cavity (38) for reversibly moving towards said support wafer (36) until contact is made between said moving member (40) and said support wafer (36).
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