Semiconductor dynamic sensor, and methods of transport and collet suction for the same
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United States of America Patent
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Feb 28, 2006
Grant Date -
Sep 30, 2004
app pub date -
Feb 5, 2004
filing date -
Mar 28, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A semiconductor dynamic sensor has a displacement portion, which is composed of a movable electrode and first and second fixed electrodes, formed in a semiconductor substrate. The movable electrode is displaced in response to applied acceleration, so that capacitance between the movable electrode and each of the first and second fixed electrodes changes. Therefore, the applied acceleration can be detected based on the capacitance change. A plurality of rectangular-shaped suction portions is provided at four corners on the surface of the semiconductor substrate. By sucking the suction portions using a collet check, the semiconductor dynamic sensor such can be transported without damaging the displacement portion.
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