MEMS piezoelectric longitudinal mode resonator
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United States of America Patent
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Feb 28, 2006
Grant Date -
Feb 12, 2004
app pub date -
Jul 31, 2003
filing date -
Aug 6, 2002
priority date (Note) -
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Abstract
A longitudinal mode resonator that includes a substrate and a bar that is suspended relative to the substrate. The bar is suspended such that it is free to expand and contract longitudinally in response to the application of an electric field across its thickness. The expansion and contraction of the bar achieves resonance in response to the field having a frequency substantially equal to the fundamental frequency of the bar.
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