System and method for laser beam expansion

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United States of America Patent

PATENT NO 7006198
SERIAL NO

10970411

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Abstract

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The present invention relates to a method and system for expanding a laser beam. An illumination system includes a horizontal reflective multiplexer and a vertical reflective multiplexer. The horizontal reflective multiplexer replicates the input beam along a first dimension to form a first multiplexed beam. The vertical reflective multiplexer replicates the first multiplexed beam along a second dimension to form a second multiplexed beam. In one example, the horizontal reflective multiplexer includes a first beam splitter, second beam splitter, and mirror. The vertical reflective multiplexer includes a beam splitter and mirror.

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Patent Owner(s)

Patent OwnerAddress
ASML HOLDING N VDE RUN 6501 VELDHOVEN NL - 5504 DR

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Augustyn, Walter Monroe, CT 6 42
Tsacoyeanes, James Southbury, CT 10 275

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